Development of pNH4-isfets microsensors for water analysis
نویسندگان
چکیده
Chemical field effect transistors (ChemFETs) have been fabricated and adapted to the ammonium ion detection thanks to polysiloxane ionosensitive layers. The chip design and packaging process have been optimized to be adapted to a specific flow head measurement system. Experimental results evidence quasinernstian response for the pNH4 measurement. This microsensor will be used for water analysis applications.
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ورودعنوان ژورنال:
- Microelectronics Journal
دوره 37 شماره
صفحات -
تاریخ انتشار 2006